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multilayered skyscraper microchips fabricated by hybrid “all-in-one” femtosecond laser processing
by：Gewinn
2020-06-02
Multi-layer micro-fluid channels integrated with functional micro-devices are the development trend of bio-chips in the future, with Si-
Integrated circuit from planing machine to three machinesdimensional (3D)
Configuration, because they provide a small scale while increasing integration, and diversify applications in response, catalysis, and cell culture.
In this paper, an optimized hybrid processing technology is proposed to manufacture real multi-layer microchips. in-
A \"3D micro-chip can be made with a continuous process of 3D glass micro-processinglaser-
Auxiliary wet etching (FLAE)
And integrate the micro-components into the manufactured micro-channel in two ways
Photon aggregation (TPP).
Create multi-layer micro-channels at different depths in the glass substrate (
The top layer is embedded at 200 μm below the surface, and the bottom layer is 200-μm spacing)
With high consistency and quality, laser power density (13~16. 9u2009TW/cm2)
Optimized to make different layers.
In order to complete the etching of each layer at the same time, this is also important to ensure high uniformity, the control layer (
(Non-laser exposure area)
Prepare at the top of the longitudinal channel.
The solvent of different dyes is used to verify the separation of each layer from other layers. The high-
The quality integration is ensured by quantitatively studying the experimental conditions in TPP, including the pre-baking time (18~40u2009h)
Laser power density (2. 52~3. 36u2009TW/cm2)
Development time (0. 8~4u2009h)
, All of which are optimized for each channel formed at different depths.
Finally, eight
A layered microfluid Channel integrated with the polymer microstructure has been successfully manufactured to demonstrate the unique capabilities of this hybrid technology.
In recent years, the highly integrated micro-flow control chip provides
Friendly, safe and efficient experimental platform is favored for its ability in basic science and practical applications such as chemical experiments, environmental monitoring, biological analysis, tissue engineering, medical diagnosis, etc.
Existing technologies have been well established, such as light printing, soft printing and nano-printing. dimensional (2D)
Micro-flow control chip
Although these microchips are effective in a wide range of applications, only the 2D manufacturing capabilities of these technologies make it possible for more complex applications, including particle separation, mixing, and pointof-care diagnose.
If the true three micro-flow control chipdimensional (3D)
Configuration can be built and they will enable the fluid to flow in a 3D environment, which can reduce the chip size and improve efficiency.
In addition, 3D multi-layer micro-flow control chips with different functions on each layer will greatly enhance their functions and performance, diversify their applications, similar to the development of 3D Si integrated circuits.
Thanks to the remarkable advantages of 3D multi-layer micro-fluid devices, people have tried to manufacture them with a variety of materials and technologies.
For example, a piece of paper
3D micro-fluid device based on stacking layer of double-layer picture paper
Double sided tape enables one person to test four different samples simultaneously through up to four different analyses and display the results on the sideby-
Side configuration.
However, this method of difficult to control the shape of the channel, optical analysis of light transmittance is not very good paperbased devices.
Another three-dimensional micro-flow control device is to stack the polypropylene ester (PMMA)
A layer of ground substrate in which exposure-
Bonding a patterned plexiglass substrate with solvent
Auxiliary hot compression bonding.
However, this method consists of multiple complex operation steps, and it is a challenge to realize the security combination between layers.
Using all-round 3D printing technology, some 3D bionic microchips embedded in the gel matrix were prepared.
Although this method can make channels with complex shapes, the mechanical properties and stability of the channels are poor.
Despite a lot of efforts in manufacturing a 3D micro-flow control chip, progress is still limited, as there is no technology that can flexibly and simply integrate different types of functional components in each layer.
There are two main difficulties in this integration.
First of all, the inner wall of the micro-channel made by traditional flat process is not flat, which requires very high integration accuracy.
Secondly, more importantly, traditional methods can only deal with 2D microstructure, and it is still challenging to integrate 3D functional microstructure in the micro-fluid channel.
Therefore, there is an urgent need for a flexible and adjustable processing technology that is compatible with both chip preparation and functional micro-structure integration.
In recent years, using laser micro-processing technology (FLM)
Demonstrated the special ability to make 3D micro/nano-structure prototypes using a variety of photosensitive materials.
Compared with the traditional micro/nano-processing technology, the micro-processing of femtosecond laser has high precision and high material
Independent versatility in processing and space
Selective manufacturing.
Specifically, under the condition of short pulse, the heat of the device can be effectively suppressed.
Quality manufacturing and further improvement of spatial resolution.
In addition, due to its extremely high peak intensity, the ability of multi-photon absorption makes direct 3D processing in transparent materials possible.
Combining these technologies will have great potential in creating 3D microchips with 3D integrated microstructures. Tickunas et al.
Reported a glass.
Polymer micro-mechanical sensors can be used to study the elastic properties of the polymer microstructure manufactured by mixing.
A passive LOC particle separator has been successfully manufactured using a hybrid subtraction to separate polystyrene balls in a water mixtureadditive-
Welding micro-manufacturing. Bragheri et al.
A sorting machine manufactured by hybrid 3D Machining Technology is reported.
At the same time, Paie and others.
The micro-fluid 3D fluid dynamics focusing device is treated using the same hybrid manufacturing process.
In our previous work, the cell counter was implemented through the technology we originally developed, which was subtracted by mixing (
Laser-
Auxiliary wet etching of glass (FLAE))and additive (two-
Photon aggregation (TPP)of polymer)3D processing.
All this work has accelerated the progress of the integrated microchip FLM technology.
However, these works are about high integration
Single-precision 2D-3D micro-assembly
Micro Channel layer.
At present, the model system promotes biological research by summarizing the body processes and functions from the molecular level to the whole organism level.
However, the lack of techniques to generalize \"multi-organ interactions\" makes it impossible for us to test how each organ interacts, thus affecting the function of other organs at the cellular level.
Therefore, it is important to improve the integration of multi-functional applications.
Adopting a multi-layer microfluid system is an effective strategy.
Due to the difficulty of achieving uniform corrosion of different layers, the manufacture of glass-based multi-layer micro-channels is still challenging.
Also, high-
The precise integration of 3D micro-components into multi-layer micro-fluids in a design manner is a challenge for the current FLM.
This paper proposes an optimized hybrid processing technology to realizein-
A \"multi-layer micro-chip, showing the manufacture of 3D multi-layer glass micro-fluid channels integrating different 3D polymer microstructure in each layer.
Glass is selected for microchip manufacturing because it is more stable, more mechanical strength than paper or plexiglass, and has a good optical transmission ratio in optical analysis.
Through Flay, multi-layer micro-fluid channels with good stability and high surface finish are promoted in a single glass chip.
Flay can directly create multi-layer micro-fluid channels embedded in glass without the need for photography and stacking and bonding of substrates through one operation.
In order to ensure the uniformity of the entire 3D multi-layer glass microchips, two new strategies are proposed.
One strategy is to optimize the Flay laser power for different layers to ensure the consistency of the laser power deposited on each layer.
Another strategy is to prepare the control layer (
(Non-laser exposure area)
Etching of all layers at the upper end of the longitudinal channel at the same time.
The height and laser parameters of the \"control layer\" are systematically studied and optimized.
The solvent of different dyes is used to verify that each layer is isolated from each other.
For the polymer structure integration of TPP in 3D multi-layer micro-channels, three important parameters (
Pre-baking time, laser power and development time)
Quantitative optimization was carried out to ensure the high quality of each layer.
Because glass and polymer SU-
8 is transparent material, both have great potential in the application of biochips, especially in the observation, detection and analysis of optical means.
The use of this hybridin-
A 3D integrated multi-layer micro-flow control chip is made by using a \"femtosecond laser\" process, which can expand the application of biological chips in the field of multi-chip.
Cell culture system with 3D configuration.
Integrated circuit from planing machine to three machinesdimensional (3D)
Configuration, because they provide a small scale while increasing integration, and diversify applications in response, catalysis, and cell culture.
In this paper, an optimized hybrid processing technology is proposed to manufacture real multi-layer microchips. in-
A \"3D micro-chip can be made with a continuous process of 3D glass micro-processinglaser-
Auxiliary wet etching (FLAE)
And integrate the micro-components into the manufactured micro-channel in two ways
Photon aggregation (TPP).
Create multi-layer micro-channels at different depths in the glass substrate (
The top layer is embedded at 200 μm below the surface, and the bottom layer is 200-μm spacing)
With high consistency and quality, laser power density (13~16. 9u2009TW/cm2)
Optimized to make different layers.
In order to complete the etching of each layer at the same time, this is also important to ensure high uniformity, the control layer (
(Non-laser exposure area)
Prepare at the top of the longitudinal channel.
The solvent of different dyes is used to verify the separation of each layer from other layers. The high-
The quality integration is ensured by quantitatively studying the experimental conditions in TPP, including the pre-baking time (18~40u2009h)
Laser power density (2. 52~3. 36u2009TW/cm2)
Development time (0. 8~4u2009h)
, All of which are optimized for each channel formed at different depths.
Finally, eight
A layered microfluid Channel integrated with the polymer microstructure has been successfully manufactured to demonstrate the unique capabilities of this hybrid technology.
In recent years, the highly integrated micro-flow control chip provides
Friendly, safe and efficient experimental platform is favored for its ability in basic science and practical applications such as chemical experiments, environmental monitoring, biological analysis, tissue engineering, medical diagnosis, etc.
Existing technologies have been well established, such as light printing, soft printing and nano-printing. dimensional (2D)
Micro-flow control chip
Although these microchips are effective in a wide range of applications, only the 2D manufacturing capabilities of these technologies make it possible for more complex applications, including particle separation, mixing, and pointof-care diagnose.
If the true three micro-flow control chipdimensional (3D)
Configuration can be built and they will enable the fluid to flow in a 3D environment, which can reduce the chip size and improve efficiency.
In addition, 3D multi-layer micro-flow control chips with different functions on each layer will greatly enhance their functions and performance, diversify their applications, similar to the development of 3D Si integrated circuits.
Thanks to the remarkable advantages of 3D multi-layer micro-fluid devices, people have tried to manufacture them with a variety of materials and technologies.
For example, a piece of paper
3D micro-fluid device based on stacking layer of double-layer picture paper
Double sided tape enables one person to test four different samples simultaneously through up to four different analyses and display the results on the sideby-
Side configuration.
However, this method of difficult to control the shape of the channel, optical analysis of light transmittance is not very good paperbased devices.
Another three-dimensional micro-flow control device is to stack the polypropylene ester (PMMA)
A layer of ground substrate in which exposure-
Bonding a patterned plexiglass substrate with solvent
Auxiliary hot compression bonding.
However, this method consists of multiple complex operation steps, and it is a challenge to realize the security combination between layers.
Using all-round 3D printing technology, some 3D bionic microchips embedded in the gel matrix were prepared.
Although this method can make channels with complex shapes, the mechanical properties and stability of the channels are poor.
Despite a lot of efforts in manufacturing a 3D micro-flow control chip, progress is still limited, as there is no technology that can flexibly and simply integrate different types of functional components in each layer.
There are two main difficulties in this integration.
First of all, the inner wall of the micro-channel made by traditional flat process is not flat, which requires very high integration accuracy.
Secondly, more importantly, traditional methods can only deal with 2D microstructure, and it is still challenging to integrate 3D functional microstructure in the micro-fluid channel.
Therefore, there is an urgent need for a flexible and adjustable processing technology that is compatible with both chip preparation and functional micro-structure integration.
In recent years, using laser micro-processing technology (FLM)
Demonstrated the special ability to make 3D micro/nano-structure prototypes using a variety of photosensitive materials.
Compared with the traditional micro/nano-processing technology, the micro-processing of femtosecond laser has high precision and high material
Independent versatility in processing and space
Selective manufacturing.
Specifically, under the condition of short pulse, the heat of the device can be effectively suppressed.
Quality manufacturing and further improvement of spatial resolution.
In addition, due to its extremely high peak intensity, the ability of multi-photon absorption makes direct 3D processing in transparent materials possible.
Combining these technologies will have great potential in creating 3D microchips with 3D integrated microstructures. Tickunas et al.
Reported a glass.
Polymer micro-mechanical sensors can be used to study the elastic properties of the polymer microstructure manufactured by mixing.
A passive LOC particle separator has been successfully manufactured using a hybrid subtraction to separate polystyrene balls in a water mixtureadditive-
Welding micro-manufacturing. Bragheri et al.
A sorting machine manufactured by hybrid 3D Machining Technology is reported.
At the same time, Paie and others.
The micro-fluid 3D fluid dynamics focusing device is treated using the same hybrid manufacturing process.
In our previous work, the cell counter was implemented through the technology we originally developed, which was subtracted by mixing (
Laser-
Auxiliary wet etching of glass (FLAE))and additive (two-
Photon aggregation (TPP)of polymer)3D processing.
All this work has accelerated the progress of the integrated microchip FLM technology.
However, these works are about high integration
Single-precision 2D-3D micro-assembly
Micro Channel layer.
At present, the model system promotes biological research by summarizing the body processes and functions from the molecular level to the whole organism level.
However, the lack of techniques to generalize \"multi-organ interactions\" makes it impossible for us to test how each organ interacts, thus affecting the function of other organs at the cellular level.
Therefore, it is important to improve the integration of multi-functional applications.
Adopting a multi-layer microfluid system is an effective strategy.
Due to the difficulty of achieving uniform corrosion of different layers, the manufacture of glass-based multi-layer micro-channels is still challenging.
Also, high-
The precise integration of 3D micro-components into multi-layer micro-fluids in a design manner is a challenge for the current FLM.
This paper proposes an optimized hybrid processing technology to realizein-
A \"multi-layer micro-chip, showing the manufacture of 3D multi-layer glass micro-fluid channels integrating different 3D polymer microstructure in each layer.
Glass is selected for microchip manufacturing because it is more stable, more mechanical strength than paper or plexiglass, and has a good optical transmission ratio in optical analysis.
Through Flay, multi-layer micro-fluid channels with good stability and high surface finish are promoted in a single glass chip.
Flay can directly create multi-layer micro-fluid channels embedded in glass without the need for photography and stacking and bonding of substrates through one operation.
In order to ensure the uniformity of the entire 3D multi-layer glass microchips, two new strategies are proposed.
One strategy is to optimize the Flay laser power for different layers to ensure the consistency of the laser power deposited on each layer.
Another strategy is to prepare the control layer (
(Non-laser exposure area)
Etching of all layers at the upper end of the longitudinal channel at the same time.
The height and laser parameters of the \"control layer\" are systematically studied and optimized.
The solvent of different dyes is used to verify that each layer is isolated from each other.
For the polymer structure integration of TPP in 3D multi-layer micro-channels, three important parameters (
Pre-baking time, laser power and development time)
Quantitative optimization was carried out to ensure the high quality of each layer.
Because glass and polymer SU-
8 is transparent material, both have great potential in the application of biochips, especially in the observation, detection and analysis of optical means.
The use of this hybridin-
A 3D integrated multi-layer micro-flow control chip is made by using a \"femtosecond laser\" process, which can expand the application of biological chips in the field of multi-chip.
Cell culture system with 3D configuration.
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